Hybrid Molecular Beam Epitaxy for Single-Crystalline Oxide Membranes with Binary Oxide Sacrificial Layers.

Shivasheesh Varshney,Sooho Choo, Liam Thompson,Zhifei Yang, Jay Shah,Jiaxuan Wen,Steven J. Koester,K. Andre Mkhoyan,Alexander S. Mcleod,Bharat Jalan

ACS NANO（2024）

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关键词
SrTiO3 thinfilm,molecular beam epitaxy,membrane,synthesis,heterogeneous integration
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