Tracking System of a Micromanipulator Based on a Piezoelectric Motor

An analysis of modern research on closed piezoelectric electric actuators is provided. The problems that exist in these studies and the direction of mathematical modeling are defined. Based on the obtained electric drive transfer functions the conditions of absolute stability of the electric drive are determined. These conditions can be taken into account during electric drive microcontroller programming. Based on the conducted research, an experimental manipulator control system was created and the piezoelectric electric drive oscillograms were given.