Grayscale Electron Beam Lithography Direct Patterned Antimony Sulfide

Wei Wang,Uwe Hübner, Tao Chen,Anne Gärtner, Joseph Köbel, Franka Jahn, Henrik Schneidwind,Andrea Dellith,Jan Dellith,Torsten Wieduwilt,Matthias Zeisberger,Tanveer Ahmed Shaik,Astrid Bingel,Markus A Schmidt,Jer-Shing Huang,Volker Deckert

arXiv (Cornell University)（2024）

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Dielectric Metasurfaces,Nanofabrication,Nanophotonics,Optical Gratings

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