Fabricating Ultra-Narrow Precision Slit Structures with Periodically Reducing Current Over-Growth Electroforming

Xiaohong Yang,Xinmin Zhang,Pingmei Ming, Yuntao Li,Wei Wang,Yunyan Zhang, Zongbin Li, Lunxu Li,Youping Xiao, Xiaoyi Guo, Zheng Yang

MICROMACHINES（2024）

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关键词
periodically reducing current,over-growth electroforming,ultra-narrow precision slit structure
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