Estimation of Thermal Stability of Si-SiO2-W Nanolayered Structures with Infrared SpectrometryLiga Avotina,Annija Elizabete Goldmane,Aleksandrs Zaslavskis,Marina Romanova,Edgars Vanags,Hermanis Sorokins,Gunta Kizane,Yuri DekhtyarMATERIALS(2024)引用 0|浏览12暂无评分关键词tungsten nanolayers,infrared spectrometry,thermal treatmentAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要