Synthesis of Silicon-Carbon Films by Induction-Assisted Plasma-Chemical DepositionAlexander A. Temirov,Ilya V. Kubasov,Andrei V. Turutin,Tatiana S. Ilina,Alexander M. Kislyuk,Dmitry A. Kiselev,Elena A. Skryleva,Nikolai A. Sobolev,Igor A. Salimon, Nikolai V. Batrameev,Mikhail D. Malinkovich,Yuri N. ParkhomenkoModern Electronic Materials（2023）引用 0|浏览21暂无评分关键词CoatingsAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
