Effect of Deposition Technique of SiN x Passivation Layer on the Electrical DC and RF Properties of AlGaN/GaN HEMT s

Yağmur Güler, Barış Onaylı, Mehmet Taha Haliloğlu,Doğan Yılmaz,Tarık Asar,Ekmel Özbay

Transactions on Electrical and Electronic Materials（2024）

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HEMT,GaN,SiNx,Passivation

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