The effect of Si content on microstructure and mechanical properties of Ti-Al-Ta-Si-N coatings

A. R. Shugurov,E. D. Kuzminov,Yu. A. Garanin,A. V. Panin,A. I. Dmitriev

VACUUM（2023）

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关键词
Transition metal nitride coatings,Magnetron sputtering,Microstructure,Nanocomposite,Mechanical properties
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