A review on the application of magnetron sputtering technologies for solid oxide fuel cell in reduction of the operating temperature

When considering the commercialization of solid oxide fuel cells (SOFCs), lowering the operating temperature has become one of the key issues urgently to be solved. Magnetron sputtering (MS) because of its versatility and ability to control composition and microstructure, is widely used in the preparation and modification of SOFC components to improve performance and durability under low temperatures. This review strives to provide a systematic summary on MS in the field of SOFC component manufacturing in the reduction of operating temperature. Initially, MS mechanism is presented and a detailed comparison of different MS methods is discussed based on target power. Besides, the application of MS for intermediate temperature (IT) and low temperature (LT) SOFC components is emphasized. Finally, the fabrication of half-sputtered and all-sputtered thin-film SOFCs with high performance at low operating temperatures is described emphatically.