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Alloy Distribution and Compositional Metrology of Epitaxial ScAlN by Atom Probe Tomography

Samba Ndiaye,Caroline Elias, Aissatou Diagne,Helene Rotella,Frederic Georgi,Maxime Hugues,Yvon Cordier,Francois Vurpillot,Lorenzo Rigutti

APPLIED PHYSICS LETTERS（2023）

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Key words
Atom Probe Tomography,Three-Dimensional Analysis,Nanoscale Characterization,Atomic Layer Deposition
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