SiO<sub>2</sub> : CuO (cu°) Targets for Depositing Thin Films of Ion-Beam Spraying Obtained by Sol-Gel Method

Studies of the structure formation features of composite inorganic materials formed on the basis of silicon dioxide, namely, pyrogenic silica of the A-380 brand (technical name – aerosil). The main purpose of the research was to study the possibility of improving the uniformity of the distribution of injected dopants on the surface of SiO 2 globules forming the xerogel framework. This goal was achieved due to the uniformity of the distribution of alloying salts (for example, copper nitrate) at the stage of sol formation, which was converted to the state of xerogel as a result of sequential heat treatment in a controlled gas environment (air or dried hydrogen). The final shape of the samples was either micro-powders or tabletshaped blanks obtained on their basis – with a diameter of about 12.5; 2.50; 30; 40 and 80 mm and a phase composition of SiO 2 : CuO and SiO 2 : Cu°.