Design and Construction of an Ultra-High Vacuum Set Up for the Characterization of Getter Films Deposited on Wafers

Alain Bosseboeuf,Clément Bessouet,Philippe Coste,Fabien Parrain, A Poizat, A Boukrit, S Jacob,Johan Moulin

HAL (Le Centre pour la Communication Scientifique Directe)（2021）

引用 0|浏览3
暂无评分
关键词
Extreme Ultraviolet Lithography,Ultra-Precision Grinding,Patterning Materials,High-Resolution Patterning
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要