Universal Deoxidation of Semiconductor Substrates Assisted by Machine-Learning and Real-Time-Feedback-Control

Chao Shen,Wenkang Zhan, Jian Tang,Zhaofeng Wu,Bo Xu,Chao Zhao,Zhanguo Wang

ACS APPLIED MATERIALS & INTERFACES（2024）

Cited 0|Views38
No score
Key words
molecular beam epitaxy,substrate,deoxidation,machine learning,real-time control
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined