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Activation of Al2O3 Surface Passivation of Silicon: Separating Bulk and Surface Effects

N. E. Grant,S. L. Pain,E. Khorani, R. Jefferies,A. Wratten, S. Mcnab,D. Walker,Y. Han,R. Beanland,R. S. Bonilla,J. D. Murphy

APPLIED SURFACE SCIENCE（2024）

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Key words
ALD,Annealing,Lifetime,Silicon,Surface passivation
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