Improved Optical Inspection of Lateral III-V-Semiconductor Oxidation Afforded by a Spectrally-Shaped Illumination
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)（2023）
Key words
AlGaAs/sur,electrical confinements,hyperspectral imaging,insulating oxide,lateral III-V-semiconductor oxidation,optical confinements,optical inspection,oxidation oven,oxide aperture,oxidized layer,oxidized region,reflectivity spectra,selective thermal oxidation,semiconductor devices,single narrow-band illumination spectrum,spatially-resolved measurements,spectrally-resolved measurements,spectrally-shaped illumination,unoxidized region,VCSEL structure,VCSEL vertical stack,vertical-cavity surface-emitting lasers
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