Erbium implantation in thin film Lithium Niobate
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)（2023）
关键词
chip light generation,complex photonic integrated circuit,complex PIC,electro-optic properties,erbium integration,high coherent transitions,ion implantation,LiNbO3:Er/int,lithium niobate crystal structure,lithium niobate thin film,microwave domains,on-chip implementation,optical domains,photonic materials,quantum optics applications,rare earth ion emitters,RIE,second order nonlinearity,smart cut technique,telecom wavelengths
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