In situ depositing Fe3O4 nanoparticles on laser-induced graphene for high performance microsupercapacitors

2022 23rd International Conference on Electronic Packaging Technology (ICEPT)(2022)

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摘要
Flexible hybrid micro-supercapacitors (MSCs) have emerged as promising micro-storage devices for flexible integrated electronics because of their small size and high power density. However, most of them need inefficient and high-cost process which limits their wide range of applications. This paper demonstrates a high-efficient technique which utilizing infrared CO 2 laser to convert the microstructured polyimide (PI) substrate into LIG and deposit Fe 3 O 4 nanoparticles on LIG under ambient air (LIG/Fe 3 O 4 ). Benefiting from the in-situ preparation of Fe 3 O 4 nanoparticles and the grooves-like structure of porous LIG, the LIG/Fe 3 O 4 -based MSCs exhibit high areal specific capacitance exceeding 43.6 mF/cm 2 . This facile process provides great prospects for the production of hybrid supercapacitors with excellent performance and offers a promising avenue for the mass fabrication flexible energy storage devices.
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关键词
Micro-supercapacitor,Laser-induced graphene,Iron oxide,Laser deposition
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