A > 64 Multiple States and > 210 TOPS/W High Efficient Computing by Monolithic Si/CAAC-IGZO + Super-Lattice ZrO2/Al2 O3/ZrO2 for Ultra-Low Power Edge AI Application

M.-C. Chen,S. Ohshita, S. Amano,Y. Kurokawa, S. Watanabe, Y. Imoto, Y. Ando, W.-H. Hsieh,C.-H. Chang,C.-C. Wu,S.-S. Chuang, H. Yoshida, M.-C. Lu,M.-H. Liao,S.-Z. Chang, S. Yamazaki

2022 International Electron Devices Meeting (IEDM)（2022）

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关键词

CAAC-IGZO,analog in-memory computing,high efficient,low power,monolithic 3D integration

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