Development of a Quartz-MEMS Resonator

SummaryThis paper presents a miniaturized high Q-factor Thickness Shear Mode Resonator (TSMR), manufacture collectively thanks to the Deep Reactive Ion Etching (DRIE) of quartz crystal wafers. The intrinsic qualities of quartz (i.e. high Q factor, low temperature sensitivity and piezoelectricity) and the advantages of DRIE allowed to fabricate resonators of small dimensions and collectively manufactured. Samples vibrating at frequency f of 88 MHz have shown promising results which lead to quality factor and resonance frequency products (Q.f) near the theoretical limit for quartz of 3.2×10 13 Hz [1].