Experimental Realization of Bulk-Silicon Feeding Network for 1×4 Terahertz Antenna Array

A bulk-silicon feeding network for 1 × 4 terahertz antenna array is presented and experimental realized together with antipodal tapered slot antennas (ATSAs). The 1 × 4 feeding network consists of rectangular waveguides and three power divider, which is designed with the fabricating boundary condition and measured together with the integrated ATSAs. The measured radiation patterns of the whole antenna array agree well with simulated results, verifying the expected performances of the feeding network, indirectly. The research in this paper indicate that the bulk-silicon feeding network is a significant approach to construct terahertz antenna array, meanwhile, suggesting a way to test the terahertz feeding network.