Plasma ion-beam 3D printing: A novel method for rapid fabrication of customized MEMS sensors

Keiji Watanabe,Masaharu Kinoshita,Toshiyuki Mine,Masatoshi Morishita,Koji Fujisaki,Ryohei Matsui,Misuzu Sagawa,Shuntaro Machida,Hiroshi Oba,Yasuhiko Sugiyama,Nobuyuki Sugii,Daisuke Ryuzaki,Hideaki Kurata,Shinji Nishimura

2018 IEEE Micro Electro Mechanical Systems (MEMS)（2018）

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摘要

This paper reports a novel method that reduces fabrication period of customized MEMS sensors. A 3D printing method with a high-current plasma focused ion beam (FIB) system was developed and applied to MEMS sensor fabrication for the first time. Capacitive MEMS vibration sensors fabricated using the conventional lithography process and the 3D printing process were compared. The difference in the resonance frequency was as small as 4%. Compared to the conventional process, the 3D printing process reduced the fabrication period by ~80%.

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关键词

rapid fabrication,customized MEMS sensors,MEMS sensor fabrication,capacitive MEMS vibration sensors,conventional lithography process,plasma ion-beam 3D printing process,fabrication period reduction,high-current plasma focused ion beam system,FIB system,resonance frequency,FIB

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