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Development of PMUT Array Packaging from Characterisation Prototypes to Customer Samples

Dominica Giusti,Alex Gritti,Fabio Quaglia,Alessandro Stuart Savoia, Hideyuki Sandoh, Gerald Klug, Hitoshi Hoshino,Dutta Rahul,Vempati Srinivasa Rao,David Ho Soon Wee, Masatoshi Wakahara,Mark Shaw

2023 IEEE 73RD ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE, ECTC（2023）

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关键词
MEMS,PMUT,FOWLP
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