Hybrid Simulation of the Plasma Characteristics in a Dual‐frequency Dual‐antenna Inductively Coupled Plasma Discharge

Xiao-Yan Sun, Ming-Hui Yang,Wei-Li Shao, Xin Tao, Long-Wei Li

CONTRIBUTIONS TO PLASMA PHYSICS（2024）

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dual-frequency dual-antenna,electron energy distribution,hybrid model,inductively coupled plasma source,plasma parameters

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