Non-contact Optical Probe with Nanometer Resolution and Large Measurement Range Based on the Astigmatism Method

Jian Xu,Qiangxian Huang,Zhihao Zhao, Xinlei Chen,Liansheng Zhang,Rongjun Cheng,Qiaosheng Pan,Ruijun Li

Measurement（2023）

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Key words
Non -contact probe,Longitudinal measurement,Range expansion,Nanometer resolution
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