Effect of Argon on Microwave Plasma Chemical Vapor Deposition of Diamond Coatings from an H 2 +CH 4 +ar Mixture Activated in a Microwave Discharge
Thermophysics and aeromechanics（2023）
Key words
diamond,microwave plasma,microwave plasma chemical vapor deposition,optical emission spectroscopy
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined