Nanorobotics and Automatic On-Wafer Probe Station with Nanometer Positionning Accuracy
2023 IEEE MTT-S INTERNATIONAL CONFERENCE ON NUMERICAL ELECTROMAGNETIC AND MULTIPHYSICS MODELING AND OPTIMIZATION, NEMO（2023）
关键词
On-wafer measurements,extreme impedance measurement,ground-signal-ground (GSG) probes,calibration,vector network analyzer (VNA)
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