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Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor for high-density embedded memory

T. Dubreuil,S. Barraud,J.-M. Pedini,J.-M. Hartmann,F. Boulard,A. Sarrazin, A. Gharbi,J. Sturm, A. Lambert,S. Martin,N. Castellani,A. Anotta,A. Magalhaes-Lucas,A. Souhaité,F. Andrieu

ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC)（2023）

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关键词
3D,OxRAM,1T1R memory,Gate-All-Around,Nanosheet FET
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