Measurement of Thermal Stress by X-ray Nano-Diffraction in (111)-Oriented Nanotwinned Cu Bumps for Cu/SiO₂ Hybrid Joints

Nanomaterials（2023）

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synchrotron radiation,X-ray nanodiffraction,thermal strain distribution,Cu/SiO2 hybrid bonding,nanotwinned Cu

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Measurement of Thermal Stress by X-ray Nano-Diffraction in (111)-Oriented Nanotwinned Cu Bumps for Cu/SiO2 Hybrid Joints