Novel Channel-on-Fin (COF) IGZO-TFTS with Ultra-Scaled Back Gate Length of 23 NM

Shangbo Yang,Gaobo Xu,Gangping Yan,Zhiyu Song,Guoliang Tian,Yanna Luo,Yinan Yan,Lianlian Li,Huaxiang Yin

2023 China Semiconductor Technology International Conference (CSTIC)（2023）

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Key words
IGZO,short channel effect,channel on fin (COF),thin film transistor (TFT)
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