Enhancement of Overlay Metrology Accuracy by Multi-Wavelength Scatterometry with Rotated Quadrupole Illumination

Hyunsok Kim,Ikhyun Jeong, Baikkyu Hong, Sunouk Nam,Sumin Jang,Kangmin Lee,Hongpeng Su,Minho Jeong,Mingyu Kim, Hongcheon Yang,Wayne Zhou,Nanglyeom Oh,Dongsub Choi,Tal Yaziv,Hedvi Spielberg,Ohad Bachar,Rawi Dirawi

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII（2023）

引用 0|浏览5

暂无评分

关键词

On Product Overlay (OPO),Scatterometry Overlay (SCOL),NZO (Non-Zero-Offset)

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要