Investigation of Wet Etching Technique for Selective Patterning of Ferroelectric Zirconium-Doped Hafnium Oxide Thin Films for High-Frequency Electronic Applications

Livia Alexandra Dinu,Cosmin Romanitan,Martino Aldrigo,Catalin Parvulescu,Florin Nastase,Silviu Vulpe,Raluca Gavrila,Pericle Varasteanu,Andreea Bianca Serban, Rihem Noumi, Olga M. Ishchenko

Materials & design（2023）

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关键词
Area-selective wet etching,Ferroelectricity,Zirconium-doped hafnium oxide,X-ray reflectivity,Phase shifter
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