In Situ H-Radical Surface Treatment on Aluminum Gallium Nitride for High-Performance Aluminum Gallium Nitride/Gallium Nitride MIS-HEMTs Fabrication.
Micromachines（2023）
关键词
AlGaN/GaN,in situ H-radical treatment,C-V frequency dispersion,pulse-mode stress,interface traps,MIS-HEMTs,current collapse,dynamic on-resistance
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