Impact of Oxygen Vacancies Profile and Fringe Effect on Leakage Current Instability of Ta<inf>2</inf>O<inf>5</inf> MIM CapacitorsV. Martinez,C. Besset,F. Monsieur,L. Montés, G. Ghibaudoopenalex(2008)引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要