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Efficient Surface Passivation of Germanium Nanostructures with 1% Reflectance.

Tsun Hang Fung,Joonas Isometsa,Juha-Pekka Lehtio,Toni P. Pasanen,Hanchen Liu,Oskari Leiviska,Pekka Laukkanen,Hele Savin,Ville Vahanissi

Nanotechnology（2023）

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Key words
nanotexturing,surface passivation,photodetector,germanium,ICP-RIE,ALD,chemical residuals
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