Investigation of Β-Ga2o3 Thick Films Grown on C-Plane Sapphire Via Carbothermal Reduction
JOURNAL OF SEMICONDUCTORS（2023）
Key words
beta-Ga2O3 epitaxy,carbothermal reduction method,growth parameters
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined