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A Round Robin Characterisation of the Thickness and Composition of Thin to Ultra-Thin AlNO Films

N.P. Barradas,N. Added,W.M. Arnoldbik,I. Bogdanović-Radović,W. Bohne,S. Cardoso,C. Danner,N. Dytlewski,P.P. Freitas,M. Jakšić,C. Jeynes,C. Krug,W.N. Lennard,S. Lindner,Ch. Linsmeier,Z. Medunić,P. Pelicon,R.P. Pezzi,C. Radtke,J. Röhrich,T. Sajavaara,T.D.M. Salgado,F.C. Stedile,M.H. Tabacniks,I. Vickridge

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms（2005）

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关键词
Thin Films,Thin Film Growth
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