Heterogeneous 3-D Sequential CFETs with Ge (110) Nanosheet P-Fets on Si (100) Bulk N-Fets
IEEE TRANSACTIONS ON ELECTRON DEVICES(2024)
关键词
Complementary field-effect-transistors (CFETs),Ge-OI,monolithic 3-dimensional (M3D),MOSFETs,wafer bonding
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