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Al Coordination and Ga Interstitial Stability in a β-(Al0.2Ga0.8)2O3 Thin Film

Adrian E. Chmielewski,Ziling Deng,Daniel Duarte-Ruiz,Parivash Moradifar,Leixin Miao,Yuewei Zhang,Akhil Mauze,Caterina Cocchi,Wolfgang Windl,Nasim Alem

ACS Applied Materials & Interfaces（2023）

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Key words
ga interstitial stability,al,thin film
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