Measurement of Dielectric Loss in Silicon Nitride at Centimeter and Millimeter Wavelengths

Z. Pan,P. S. Barry,T. Cecil,C. Albert,A. N. Bender,C. L. Chang,R. Gualtieri,J. Hood,J. Li,J. Zhang,M. Lisovenko,V. Novosad,G. Wang,V. Yefremenko

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY（2023）

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关键词
Dielectrics loss,silicon nitride (SiNx),millimeter wavelength,two-level system (TLS),quality factor
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