Micro- and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates

Yudai Nakanishi,Yusuke Hayashi,Takeaki Hamachi,Tetsuya Tohei,Yoshikata Nakajima,Shiyu Xiao,Kanako Shojiki,Hideto Miyake,Akira Sakai

Journal of electronic materials（2023）

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AlN,nanopatterned sapphire substrate,transmission electron microscopy,metalorganic vapor-phase epitaxy,hydride vapor-phase epitaxy,face-to-face annealed sputter-deposited AlN

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