Phosphorus Diffusion and Deactivation During SiGe OxidationChappel S. Thornton,Xiao Shen,Blair Tuttle,Xuebin Li,Mark E. Law,Sokrates T. Pantelides,George T. Wang,Kevin S. JonesJOURNAL OF APPLIED PHYSICS（2023）引用 0|浏览40暂无评分关键词Dielectric BreakdownAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
