Augmentation of the Stable Static Travel Range of Electrostatically Actuated Slender Nano-Cantilevers by Accounting for the Influence of the Van Der Waals Force
International journal for computational methods in engineering science and mechanics（2023）
关键词
Electrostatically actuated cantilevers,Galerkin's technique,MEMS,NEMS,Static pull-in instability,Static travel range augmentation
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