Leakage Mechanism in Ferroelectric Hf0.5Zr0.5O2 Epitaxial Thin FilmsXianlong Cheng,Chao Zhou,Baichen Lin,Zhenni Yang,Shanquan Chen,Kelvin H. L. Zhang,Zuhuang ChenAPPLIED MATERIALS TODAY(2023)引用 1|浏览12暂无评分关键词Leakage mechanism,Ferroelectric,Epitaxial thin filmsAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要