Direct tape casting of Al2O3/AlN slurry for AlON transparent ceramic wafers via one-step reaction sintering
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY(2023)
摘要
In this work, transparent aluminate oxynitride (AlON) ceramic wafers were successfully fabricated by the direct non-aqueous tape casting of Al2O3/AlN slurry and the one-step reaction sintering for the first time. The reaction sintered AlON ceramic wafer exhibits high transmittance of 73.2 % at the wavelength of 1600 nm. This fabricating route realizes smooth and flexible tape without cracks or pinholes in Al2O3/AlN system and efficiently shortens the preparation cycle of transparent AlON wafers, which is a feasible way to prepare high-quality transparent AlON ceramics with large lateral sizes and thin thicknesses by reaction sintering, might also promote the application of transparent AlON ceramic wafers.
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关键词
Transparent ceramic,AlON wafers,Tape casting,Non -aqueous,One-step reaction
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