Non-planar Growth of High Al-mole-fraction AlGaN on Patterned GaN Platforms for Mitigating Strain-Induced Cracks Beyond the Critical Layer Thickness

Yuto Ando,Frank Mehnke,Henri Bouchard,Zhiyu Xu,Alec M. Fischer,Shyh-Chiang Shen,Fernando A. Ponce,Theeradetch Detchprohm,Russell D. Dupuis

Journal of crystal growth（2023）

引用 3|浏览23

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关键词

A3. Metalorganic chemical vapor deposition,A3. Low pressure metalorganic vapor phase,epitaxy,A3. Superlattices,B1. itrides,B2 .Semiconducting III-V materials,B3 .Laser diodes

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