Design and Optimization of a Fast Steering Mirror Closed-Loop Controller

In this paper, the simple motion model and circuit amplification model of the fast mirror are deduced, and the system model of the fast mirror is obtained by the system identification method-Chirp frequency sweep according to the motion model. The controller of the fast mirror is designed. Finally, by optimizing the controller parameters, the fluctuation at the resonance peak is reduced, and finally a better control effect is achieved. The FSM motion range is greater than $\pm 0.8^{\circ}$ , the bandwidth is better than 100Hz, and the resolution reaches 20urad.