An Electrical Inline-Testable Structure to Monitor Gate-Source/Drain Short Defect Caused by Imperfect Fin-Cut Patterning in FinFET Technology
2023 35th International Conference on Microelectronic Test Structure (ICMTS)（2023）
Key words
MOSFET,FinFET,Defect,Inline Test,Electrical Test,Layout Design
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