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The Fabrication of Cr/Cu Alloy Electrodes for Low-DC Voltage Adaptive Liquid Lens

IEEE photonics technology letters(2023)

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摘要
We report an alloy electrode design for an adaptive liquid lens with a low DC voltage. Due to dielectrophoretic, the focal length of liquid lens can be adapted by applying the electric potential to the electrodes. Herein, the Cr/Cu alloy electrodes in a concentric interdigitate structure with an image aperture of 3 mm were designed and fabricated by a photolithography technique. By using the alloy electrode, the glycerin as the droplet and the commercial silicone oil as the ambient liquid can be applied to form the adaptive liquid lens with a cost-effective. The focal length of designed electrode with the gap of 125 mu m and width of 125 mu m can be tunable from 14.5 mm to 11.8 mm under the applied voltage range from 0 - 12 volts.
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关键词
Liquid lens,dielectrophoretic,alloy electrode
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