X–Ka Band Epitaxial ScAlN/AlN/NbN/SiC High-Overtone Bulk Acoustic Resonators
IEEE electron device letters（2023）
关键词
Bulk acoustic resonators,piezoelectric devices,microwave/millimeter wave measurements,radio frequency microelectromechanical systems,microfabrication,semiconductor epitaxial layers
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要