Device Structure and Fabrication Process for Silicon Spin Qubit Realizing Process-Variation-robust SWAP Gate Operation

Hidehiro Asai,Shota Iizuka, Tohru Mogami,Junichi Hattori,Koichi Fukuda,Tsutomu Ikegami,Kimihiko Kato,Hiroshi Oka,Takahiro Mori

Japanese journal of applied physics（2023）

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关键词

silicon spin qubit,SWAP gate,process variation,gate fidelity,TCAD simulation

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